作者：梁彤翔; 朱钧国; 杨冰; 张秉忠; 彭新立; 王英华; 李恒德

摘要：The states and the causes of sintering stress produced in AlN/W co_sintered multilayer substrates were studied. Stress states are different in two stages:in the sintering stage,in_plane stresses are developed in W film which leads to high porosity and reducation of sintering rate; in the soaking stage, radial stresses are developed in AlN near the AlN/W interface, which reduces the shrinkage rate and density of AlN ceramic.

出版商：硅酸盐学报 卷: 26 期: 3 页: 286 文献号: 0454-5648(1998)26:3<286:AWDCTG>2.0.TX;2-3

出版日期：1998年